INFICON IC6 Thin Film Deposition Controller User Manual

Thin film deposition controller

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IC6

Thin Film Deposition Controller

PN 074-505-P1F

Cover Page

Table of contents

Document Outline

Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Table Of Contents
Chapter 1 Introduction and Specifications
- 1.1 Introduction
  - 1.1.1 Related Manuals
- 1.2 IC6 Safety
- 1.3 How To Contact INFICON
  - 1.3.1 Returning Your IC6
- 1.4 IC6 Specifications
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial Power-On Verification
Chapter 2 Installation and Interfaces
- 2.1 Location Guidelines
- 2.2 Avoiding Electrical Interference
- 2.3 Connecting the Controller
  - 2.3.1 Routing XIU Cables
  - 2.3.2 Interface Cable Fabrication and Pin-Out
Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 Process Description
- 3.5 State Descriptions
- 3.6 Special Features
Chapter 4 Sensor & Source Setup
- 4.1 Sensor Setup Introduction
  - 4.1.1 Sensor Display Navigation
  - 4.1.2 Sensor Parameters
- 4.2 Source Setup Introduction
  - 4.2.1 Source Navigation
  - 4.2.2 Source Parameters
- 4.3 DAC Output Selection Rules
Chapter 5 Material Setup
- 5.1 Introduction
Chapter 6 Process Setup
- 6.1 Process Setup Introduction
- 6.2 Overview Page
- 6.3 Curr(ent) Proc(ess) Page
- 6.4 Process Layers 1 - 10 etc.
  - 6.4.1 Layer Parameters
    - 6.4.1.1 Layer Parameter Editing
    - 6.4.1.2 Layer Parameters
- 6.5 Special Layer Parameter Features
  - 6.5.1 Skip Deposit
Chapter 7 General Parameters
- 7.1 General Setup Overview
- 7.2 General Screen Process Page
- 7.3 DACs Page Parameters
- 7.4 COMM Page Parameters
- 7.5 MESSAGE Page Setup
- 7.6 DATE / TIME Set Up
- 7.7 TEST Page Set Up
- 7.8 LOCK Page Code Setup
- 7.9 AUDIO / VISUAL Page Set Up
Chapter 8 Digital I/O
- 8.1 Digital I/O Screen
- 8.2 All Input Page
- 8.3 All Output Page
- 8.4 I/O Board Page
  - 8.4.1 Output Type
Chapter 9 Logic Statement Setup
- 9.1 Logic Statement Overview
- 9.2 Editing the Logic Statements
- 9.3 IF Event Definitions
- 9.4 THEN Action Definitions
- 9.5 Logic Statement Example
Chapter 10 Remote Communications
- 10.1 Remote Communication Configuration Overview
- 10.2 Physical Connections
  - 10.2.1 RS-232C Serial Port
  - 10.2.2 TCP/IP Ethernet Port
    - 10.2.2.1 Network Connection
    - 10.2.2.2 How to Set Up the Network Protocol on the PC
- 10.3 Message Format
  - 10.3.1 Protocol
  - 10.3.2 Data Type Codes
- 10.4 Communication Commands
Chapter 11 Applications
- 11.1 Multiple Sensor Deposition Control
  - 11.1.1 IC6 Parameters and Corrections for Multiple Sensor Operation
- 11.2 Trend Analysis
  - 11.2.1 IC6 Parameters Associated with the Trend Analysis Feature
- 11.3 IC6 Cygnus Emulation
- 11.4 IC6 Four & Six Layer (Cygnus Emulation) Configuration
Chapter 12 Maintenance and Calibration Procedures
- 12.1 Importance of Density, Tooling and Z-Ratio
- 12.2 Determining Density
- 12.3 Determining Tooling
- 12.4 Laboratory Determination of Z-Ratio
- 12.5 AutoTuning
- 12.6 Determining Cross Talk Calibration For Co-Deposition
- 12.7 Source Maintenance
  - 12.7.1 Source Maintenance Parameters
- 12.8 System Status
Chapter 13 Counters & Timers
- 13.1 Introduction
Chapter 14 USB Storage
- 14.1 File Handling (USB)
  - 14.1.1 USB Storage Devices
- 14.2 Directory Structure
- 14.3 Configuration Files
- 14.4 Data Logs
- 14.5 Screen Captures
Chapter 15 Troubleshooting, Status and Error Messages
- 15.1 Status Messages
- 15.2 User Messages
- 15.3 AutoTune and Calibration Messages
- 15.4 STOP messages
- 15.5 Transient Messages
- 15.6 Input Error Messages
- 15.7 Troubleshooting Guide
- 15.8 Replacing the Crystal
- 15.9 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
Chapter 16 Measurement and Control Theory
- 16.1 Basics
Appendix A Material Table
- A.1 Introduction