INFICON IC6 Thin Film Deposition Controller - Manual (Page 326)

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IC6 Operating Manual
18 BaN
2
O
6
3.244 1.261 barium nitrate
19 BaO 5.720 *1.000 barium oxide
20 BaTiO
3
5.999 0.464 barium titanate (tetr)
21 BaTiO
3
6.035 0.412 barium titanate (cubic)
22 Be 1.850 0.543 beryllium
23 BeF
2
1.990 *1.000 beryllium fluoride
24 BeO 3.010 *1.000 beryllium oxide
25 Bi 9.800 0.790 bismuth
26 Bi
2
O
3
8.900 *1.000 bismuth oxide
27 Bi
2
S
3
7.390 *1.000 bismuth trisulfide
28 Bi
2
Se
3
6.820 *1.000 bismuth selenide
29 Bi
2
Te
3
7.700 *1.000 bismuth telluride
30 BiF
3
5.320 *1.000 bismuth fluoride
31 C 2.250 3.260 carbon (graphite)
32 C 3.520 0.220 carbon (diamond)
33 C
8
H
8
1.100 *1.000 parlyene (union carbide)
34 Ca 1.550 2.620 calcium
35 CaF
2
3.180 0.775 calcium fluoride
36 CaO 3.350 *1.000 calcium oxide
37 CaO-SiO
2
2.900 *1.000 calcium silicate (3)
38 CaSO
4
2.962 0.955 calcium sulfate
39 CaTiO
3
4.100 *1.000 calcium titanate
40 CaWO
4
6.060 *1.000 calcium tungstate
41 Cd 8.640 0.682 cadmium
42 CdF
2
6.640 *1.000 cadmium fluoride
43 CdO 8.150 *1.000 cadmium oxide
44 CdS 4.830 1.020 cadmium sulfide
45 CdSe 5.810 *1.000 cadmium selenide
46 CdTe 6.200 0.980 cadmium telluride
47 Ce 6.780 *1.000 cerium
48 CeF
3
6.160 *1.000 cerium (III) fluoride
49 CeO
2
7.130 *1.000 cerium (IV) dioxide
50 Co 8.900 0.343 cobalt
51 CoO 6.440 0.412 cobalt oxide
52 Cr 7.200 0.305 chromium
53 Cr
2
O
3
5.210 *1.000 chromium (III) oxide
Table A-1 Material table (continued)
Code Formula Density Z-Ratio Material Name