beautypg.com

7 state descriptions, 1 nondepcntl state, 2 suspend – INFICON IC6 Thin Film Deposition Controller User Manual

Page 242: 3 idle

background image

11 - 10

PN

07

4-

50

5-

P1

F

IC6 Operating Manual

11.4.7 State Descriptions

(See

section 3.5 on page 3-32

.)

11.4.7.1 NonDepCntl State

Once a layer reaches its Final Thickness and enters the NonDepCntl state,

Remote command (see chapter 10 in the IC6 manual)

RL 2 # zeroes the layer’s thickness and reenters deposit,

RL 0 # suspends the layer.

RL 4 # places the layer in the programmed PostDeposit state.

Logic statements (see chapter 9) can also be used to zero thickness, continue
deposit etc.

11.4.7.2 Suspend

Once a layer is suspended, it can only be restarted with a Start from the front panel,
RG 0 command or a logic statement. All suspended layers will be started together.

11.4.7.3 Idle

Once a layer is in Idle, it can only be restarted after all active layers reach Idle and
end-of-process.

THEN (Actions)

(see

section 9.4 on page 9-16

)

Start #

Start (starts the first layer in Ready and all layers in Stop or
Suspend) or
Start Deposit Material# or
Continue Deposit Material# ( both only from NonDep Cntl)

Stop #,

Suspend Material#, (if not in Idle)

Stop All

Stop

Reset #

Reset All

Reset

Table 11-1 Logic functions table (continued)

Cygnus

# is Channel number

IC6