INFICON IC6 Thin Film Deposition Controller - Manual (Page 79)

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IC6 Operating Manual
3.4 Process Description
The IC6 allows sequential deposition control for a maximum of 200 layers in all of
its 50 processes. Up to six layers can be started and rate controlled at the same
time. Two sequential layers can be linked as being co-deposited, enabling
crosstalk correction and ratio control. A layer that is linked to another by
co-deposition can not be linked to a third layer for co-deposition control or crosstalk
correction. Therefore, it is possible to simultaneously control six rates independent
of each other or control up to three sets of two layers linked by co-deposition with
crosstalk correction and ratio control.
3.4.1 Defining a Process
The following procedure is used to define a process. (All steps do not necessarily
have to be followed in the given order.)
1 Make sure the IC6 is in READY.
Some configuration and process parameters can be changed only while the
IC6 is in READY. Therefore, before setting parameters, make sure READY
appears as the state on the OPERATE display. See
Figure 3-19 . If READY is
not displayed, press STOP then RESET.
Figure 3-19 Operate display - READY