INFICON IC6 Thin Film Deposition Controller - Manual (Page 278)

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IC6 Operating Manual
CrossTalk > 100% One or both of the co-deposited
layers has a Cross Talk
percentage ≥100%.
When starting a co-dep layer the
Cross Talk % is checked. If the
calculated Cross Talk % is
≥100% then there must be a
problem with the cal thickness
values the user entered and the
layer stops with this message as
the cause of stop. If a layer is
running and the cal thickness
values are changed to cause the
calculated Cross Talk % ≥100%
then the layer stops with this
message as the cause of stop A RESET command
received from the keyboard,
digital input, remote
communications or a Logic
action.
A Start, if the condition
causing the stop has been
cleared and the process can
resume. All 14
DAC Failure Monitoring of the DAC output via
an ADC determined that the
output voltage is incorrect. All 15
Half Rate Fail AutoTune is unable to vary the
source power to obtain half the
desired deposition rate. AutoTune 16
Low Rate Auto tuning is terminated when
the deposition rate at the start of
tuning is below 0.1 Å/s. AutoTune 17
AutoTune Fail The complete tune partition of
AutoTune did not determine
reliable system response results. AutoTune 18
Quick Tune Fail The Quick tune portion of
AutoTune did not get repeatable
system response results. AutoTune 19
Bad Co-Dep Load The loading of co deposition
layers is bad All 20
Uncalibrated The co-deposition layers are un
calibrated. All 21
Bad Layer Load There was a problem loading a
layer. All 22
Table 15-4 Stop messages (continued)
Cause of STOP
Message Set Clear Screen Remote
Comm.
Encodes