INFICON IC6 Thin Film Deposition Controller - Manual (Page 31)

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IC6 Operating Manual
Backup Sensor . . . . . . . . . . . . . . . . . 0 to 8
Backup Tooling . . . . . . . . . . . . . . . . . 1.0 to 999.9%
(Crystal) Quality Percent . . . . . . . . . 0 to 99%
(Crystal) Quality Counts . . . . . . . . . . 0 to 99
(Crystal) Stability Single . . . . . . . . . . 0 to 9999 Hz
(Crystal) Stability Total . . . . . . . . . . . 0 to 9999 Hz
Recorder Output. . . . . . . . . . . . . . . . 0 to 12
Recorder Function . . . . . . . . . . . . . . Rate, Thick(ness), RateDev(iation), Power
Recorder Range . . . . . . . . . . . . . . . . 0 to 99999
1.4.3.5 Process Layer Parameters
50 processes can be created and given unique names (15 character max.).
Each process can contain 200 layers.
Material. . . . . . . . . . . . . . . . . . . . . . . 0 to 32
Final Thick(ness) . . . . . . . . . . . . . . . 0.000 to 999.99 kÅ
Thick(ness) Limit . . . . . . . . . . . . . . . 0.000 to 999.99 kÅ
Cruc(ible) . . . . . . . . . . . . . . . . . . . . . 1 to 64
Co-Dep(osition) . . . . . . . . . . . . . . . . Yes/No
Ratio C(o)ntr(o)l . . . . . . . . . . . . . . . . 0 to 999.9% (if CoDep)
1.4.3.6 General Global Parameters
Active Process . . . . . . . . . . . . . . . . . 1 to 50
Layer To Start . . . . . . . . . . . . . . . . . 1 to 200
Run # . . . . . . . . . . . . . . . . . . . . . . . . 1 to 9999
Auto Start Next (Layer). . . . . . . . . . . Yes / No
Max Concurrent Layer . . . . . . . . . . . 1 to 6
Layers Displayed . . . . . . . . . . . . . . . Auto, 4 Layers, 6 Layers
Active Layer Output . . . . . . . . . . . . . First of eight consecutive outputs encoded to
indicate the number of the loaded layer (first
if multiple layers) that will be executed on a
Start. 00000001 indicates layer 1, 00010011
indicates layer 200.
Date Format . . . . . . . . . . . . . . . . . . . DDMMYYYY or MMDDYYYY