INFICON IC6 Thin Film Deposition Controller - Manual (Page 46)

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IC6 Operating Manual
2.1.3 IC6 Installation
The IC6 is designed to be rack mounted. It may be also used on a table. The IC6
is forced-air cooled, with the air flow exiting the rear of the IC6 for clean room
convenience.
It is generally advisable to centrally locate the IC6, minimizing the length of external
cabling. The cable from the Sensor card to the XIU is typically fifteen feet. Thirty,
fifty and one hundred foot cables are available.
2.2 Avoiding Electrical Interference
Careful consideration of simple electrical guidelines during installation will avoid
many problems caused by electrical noise.
To maintain the required shielding and internal grounding and ensure safe and
proper operation, the IC6 must be operated with all enclosure covers, sub-panels
and braces in place and fully secured with the screws and fasteners provided.
NOTE: When using the IC6 with an RF sputtering system, the cable between the
IC6 and oscillator should be kept as far away from the RF transmission
cable as possible. Interference from the RF transmission cable may cause
an erroneous crystal fail.
2.2.1 Verifying/Establishing Earth Ground
If a ground must be established, the following procedure is recommended:
 Where soil conditions allow, drive two ten foot copper clad steel rods into the
ground six feet apart. Pour a copper sulfate or a salt solution around each rod
to improve the ground’s conduction. A near zero resistance measurement
indicates earth ground is achieved.
 Keep connections to this grounding network as short as possible.