INFICON IC6 Thin Film Deposition Controller - Manual (Page 95)

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IC6 Operating Manual
3.6.6 Handheld Controller
An optional Handheld Controller (IPN 755-262-G1), see Figure 3-22 , is available
as an accessory with the IC6. The Handheld Controller serves as a wired remote
to manually control power, switch crystals and produce a STOP.
The Handheld Controller is attached to the IC6 with a modular plug to the front
panel.
Power is affected only when in Manual mode by moving the POWER/STOP switch
laterally. Pressing to the left as idicated by the INCR arrow, increases the power.
Pressing to the right as indicated by the DECR arrow, decreases the power.
A STOP is produced by moving the POWER/STOP switch down.
When on the Sensor Information screen, and an XtalTwo (CrystalTwo), XtalSix
(CrystalSix), Xtal12 (Crystal12), or Generic sensor is selected, a crystal switch is
activated by pressing the red button on the body of the controller.
The Handheld Controller kit includes a convenience hook for the Handheld
Controller that can be attached to the IC6’s mounting ears or some other
accessible location.
Figure 3-22 Handheld controller
3.6.6.1 Determining Soak Power with the Handheld Controller
The Handheld Controller is a useful tool that can be used to determine the
appropriate Soak Power levels. Below is an example of how a typical process Soak
1 and Soak 2 can be determined using the Handheld Controller.
Determining Soak 1
Use the Handheld Controller to slowly increase power, a few percent-per-minute.
Watch the rate until some rate increase is detected. Depending on the type of
source used, this may take several minutes. Once a non-zero rate is achieved, note
the current percent power. Use a percent or more lower than this for the Soak
Power 1 parameter.