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3 cross talk calibration calibrate display – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

12.6.3 Cross Talk Calibration CALIBRATE display

Upon entering this display the thickness values are zeroed and the aggregate rate
will be controlled to the desired rate. Thickness will accumulate on each of the
sensors set for Calibrate Yes. Calibration will continue until a 300 Hz frequency
shift has taken place on the sensors selected in the Material Sensor page (i.e., the
sensors used to calculate the Aggregate Rate). The instrument will stay in the
automatic calibration mode for a minimum of 1 minute. The estimated time to
complete calibration is displayed.

If the desired 300 Hz frequency shift has not taken place within 15 minutes,
automatic calibration will time out and a Status error message will be given. When
automatic calibration is completed the IC6 will enter a CAL RAMP Power Down
state in which the source control power is ramped to Zero over the time period
designated by this material's Idle Ramp Time.

Figure 12-10 Crosstalk calibrate display