7 source maintenance – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
12.7 Source Maintenance
The Source Maintenance page allows toggling source and sensor shutters and
rotating the crucible indexer associated with a selected material. Source power
may be manually adjusted using the hand-held controller.
The unit must be in Ready mode to Enable Source Maintenance and it must be
Disabled to exit back to normal operation.
Figure 12-12 Source maintenance page
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