INFICON IC6 Thin Film Deposition Controller User Manual

Page 166

9 - 18

IC6 Operating Manual

SOAK 1 HOLD (ON/OFF) ## . . . . . 0 (any material) to 32

If active (ON), the designated Material ## will pause execution and maintain
Soak Power 1 until Soak Hold 1 is turned OFF. Commands from Remote Comm
and Logic will be independent.

SOAK 2 HOLD (ON/OFF) ## . . . . . 0 (any material) to 32

If active (ON), the designated Material ## will pause execution and maintain
Soak Power 2 until Soak Hold 2 is turned OFF. Commands from Remote Comm
and Logic will be independent.

START

This action is identical to pressing the START button on the front panel.

START DEPOSIT ## . . . . . . . . . . . . 0 (any material) to 32

This function is used to place the layer that uses the designated Material ## into
Deposit from the NONDEP CNTL state and zero the thickness. If the crystal is
failed, this command will make the Material go into Time Power if the previous
state was Non-Deposit Hold, otherwise the action is not allowed. Cannot be
done from Ready, Idle, Stop, Crystal Switch Suspend, or Crucible Switch.
When in Ready or Stop, use the Start action.

START INHIBIT . . . . . . . . . . . . . . . . ON/OFF

This feature, when active, prohibits the START of a layer. It does not inhibit the
START DEPOSIT function. Once Start Inhibit is ON, a layer cannot be started
until the START INHIBIT is deactivated (set to OFF). Commands from Remote
Comm and Logic will be independent. START INHIBIT will carry through a
power cycle

START TIMER ## . . . . . . . . . . . . . . 1 to 20

Starts the designated timer ##.

STOP

This action is identical to pressing the STOP button on the front panel. The
condition remains true until a RESET or START command is received.

SUSPEND ##. . . . . . . . . . . . . . . . . . 0 (any material) to 32

Sets source power for the designated Material ## to zero and freezes its rate
and thickness values until a Start is received.

SWITCH XTAL # . . . . . . . . . . . . . . . 1 to 8

This action activates the Crystal Switch output for the sensor number #
indicated. It indexes to the next crystal position listed when using a
multi-position sensor. This function is available only if a multi-position sensor
type is chosen in Sensor Set Up.