INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
The Auto Tune feature of the IC6 is accessed via the Main Menu Maintenance
display.
Figure 12-1 AutoTune overview
The default condition is Auto Tune Disabled.
To enable Auto Tune, move the cursor onto the Disabled box and press TOGL,
then ENTER.
The parameter value should now show Enabled. To return to the Main Menu
display, disable the Auto Tune function by setting it back to Disabled.
Figure 12-2 AutoTune parameters display
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