INFICON IC6 Thin Film Deposition Controller - Manual (Page 329)

A - 5
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
126 MnS 3.990 0.940 manganese (II) sulfide
127 Mo 10.200 0.257 molybdenum
128 Mo
2
C 9.180 *1.000 molybdenum carbide
129 MoB
2
7.120 *1.000 molybdenum boride
130 MoO
3
4.700 *1.000 molybdenum trioxdide
131 MoS
2
4.800 *1.000 molybdenum disulfide
132 Na 0.970 4.800 sodium
133 Na
3
AIF
6
2.900 *1.000 cryolite
134 Na
5
Al
3
F
14
2.900 *1.000 chiolite
135 NaBr 3.200 *1.000 sodium bromide
136 NaCl 2.170 1.570 sodium chloride
137 NaCIO
3
2.164 1.565 sodium chlorate
138 NaF 2.558 1.645 sodium fluoride
139 NaNO
3
2.270 1.194 sodium nitrate
140 Nb 8.578 0.492 niobium (columbium)
141 Nb
2
O
3
7.500 *1.000 niobium trioxide
142 Nb
2
O
5
4.470 *1.000 niobium (v) oxide
143 NbB
2
6.970 *1.000 niobium boride
144 NbC 7.820 *1.000 niobium carbide
145 NbN 8.400 *1.000 niobium nitride
146 Nd 7.000 *1.000 neodynium
147 Nd
2
O
3
7.240 *1.000 neodynium oxide
148 NdF
3
6.506 *1.000 neodynium fluoride
149 Ni 8.910 0.331 nickel
150 NiCr 8.500 *1.000 nichrome
151 NiCrFe 8.500 *1.000 Inconel
152 NiFe 8.700 *1.000 permalloy
153 NiFeMo 8.900 *1.000 supermalloy
154 NiO 7.450 *1.000 nickel oxide
155 P
3
N
5
2.510 *1.000 phosphorus nitride
156 Pb 11.300 1.130 lead
157 PbCl
2
5.850 *1.000 lead chloride
158 PbF
2
8.240 0.661 lead fluoride
159 PbO 9.530 *1.000 lead oxide
160 PbS 7.500 0.566 lead sulfide
161 PbSe 8.100 *1.000 lead selenide
Table A-1 Material table (continued)
Code Formula Density Z-Ratio Material Name