INFICON IC6 Thin Film Deposition Controller - Manual (Page 221)

10 - 51
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
9
(0x09)
Close Source shutter Only allowed if in Manual
10
(0x0a)
Set Averaged Rate Range is 0-999.9. Only in Time power or Non Deposit Hold - the
estimated rate used.
11
(0x0b)
N/A
Table 10-16 Remote layer (continued)
RL
Command
ID
Meaning
Action
Value
Notes