INFICON IC6 Thin Film Deposition Controller User Manual

Page 236

11 - 4

IC6 Operating Manual

AGGREGATE MULTIPLIER

The parameter AGGREGATE MULTIPLY (Yes/No) determines whether an
aggregate multiplier is calculated for this crystal's rate information if a crystal
fails occurs during deposition. This parameter appears on the Material/Sensor
display if Multipoint is set to Yes. This multiplier is used only during the layer in
which the crystal failure occurs. After this layer is finished, the multiplier is
cleared. Default is NO.

(SENSOR) WEIGHT . . . . . . . . . . . . 1.0 to 400.0 %

The Sensor Weight parameter is used to gauge the relative importance of an
individual sensor's is measured rate in calculating the weighted average,
“aggregate” rate. See

see page 5-9

. Default is 100%.

(SENSOR) FAILURE ACTION
and FAILURE TRIGGER . . . . . . . . . See

see page 5-9

TOOLING: MASTER & SENSOR

The tooling factor is comprised of two parts. The MASTER TOOLING
parameter located in the upper block of the Material/Sensor Set-Up display is
used to scale the aggregate rate and thickness to the substrate. When
Multipoint is set to Yes, additional parameters, including the SENSOR
TOOLING parameter appear in the Sensor Setup display area as shown in

Figure 11-2 on page 11-3

MASTER TOOLING. . . . . . . . . . . . . 10.0 to 400.0 %

The MASTER TOOLING is used as a global tooling factor. This parameter is
used to affect all the sensors' tooling together and calibrate the aggregate rate
and thickness to the thickness measured on the substrate. Default is 100%.

(SENSOR) TOOLING . . . . . . . . . . . 10.0 to 400.0 %

SENSOR TOOLING is used to account for the geometric tooling factor of each
sensor. The default value is 100%. The calibration procedure for the MASTER
TOOLING can also be applied to the SENSOR TOOLING parameter.
Alternatively each SENSOR's TOOLING factor can be adjusted relative to a
particular sensor. See

see page 5-9