2 operate, Figure 3-4 – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
3.3.2 Operate
The Operate display, see
, provides information about the current
layer(s) in process. This includes the layer #, material, source #, and sensor #
currently in process. The rate, thickness, power level, state, state time, layer time,
and process time are updated once a second.
The graph gives an analog display of the Power% level or the rate deviation from
the desired rate while depositing. With the cursor on the upper Y-axis value, use
the TOGL key to choose Rate Deviation or Power% graphing. Similarly, with the
cursor on the X-axis label, use the TOGL key to choose the desired Graph Scan
Rate.
Below the graph is a message area consisting of five lines. The Status Messages
area, see
, occupies the first four lines. Transient Messages, see
, share the fifth line. This
area displays error messages, custom user messages and system status
information, such as indicating the IC6 is in Test mode. Status messages are
displayed as long as a status is true. They are put up and taken down as the
condition that set them changes. Since there is limited space for the status
messages, if too many status messages are displayed at the same time (greater
than 4), newer messages will be displayed if they are cleared, the old messages
will appear again assuming the condition is still applicable.
Figure 3-4 Operate screen
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