7 deposit page parameters – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
Power level. The control voltage is maintained at the Idle Power level until the IC6
enters the STOP state or until the next layer, using the specified source, is started,
or the turret source is rotated.
IDLE POWER . . . . . . . . . . . . . . . . . 0.0 to 99.99%
This value is the power level at which the source is maintained after the
DEPOSIT state (or after Feed state if one is set up). Idle Power is usually the
same as Soak Power 1. The default value is 0%. The power level will be set to
zero before a crucible switch is done.
IDLE RAMP TIME . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This is the time interval over which the source power is ramped linearly from
the power level at the end of Deposit (or Feed state if one is set) to Idle Power.
The default value is 00:00.
5.1.7 Deposit Page Parameters
MATERIAL NUMBER . . . . . . . . . . . 1 to 32
Change the number to edit or create a different material
RATE . . . . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s (default = 0.000)
NOTE: Rate = 0.000 will skip the Deposit state and take a layer to the
post-Deposit state.
This specifies the rate at which the deposition is to be controlled during the
DEPOSIT and NON-DEPOSIT CONTROL states. The Rate is calculated
based on:
The rate information acquired by the sensor(s) in use, based on the density
and Z-Ratio values entered for this material.
The tooling factors that correct for any relative difference in flux distribution
reaching the sensor(s) used for this material.
TIME LIMIT . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This is the deposition time at which the Time Limit is triggered. This time begins
to accumulate at the start of the Deposit state. The Time Limit, once triggered,
remains active until the start of the IDLE state. The default value is 00:00.
RATE FILTER TIME. . . . . . . . . . . . . One Tenth (0), Four Tenths (1), One (2),
Four (3), Ten (4), Twenty (5), Thirty (6)
seconds
This parameter is used to apply a boxcar filter to the measured raw rate which
is used to produce the Source Recorder Rate DAC output voltage, see
Recorder Output on page 5-6 under
. This filter does not apply to
the Sensor Rate recorder output programmed at