INFICON IC6 Thin Film Deposition Controller - Manual (Page 105)

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IC6 Operating Manual
4.2.2 Source Parameters
Figure 4-4 Source parameter page
The following parameters can be edited for each of the 6 source control channels.
SOURCE NUMBER . . . . . . . . . . . . . 1 to 6
Enter the number of the source to be edited.
DAC OUTPUT . . . . . . . . . . . . . . . . . 0 to 12
This parameter designates which of the DAC outputs is to be used as a source
output. Values range from 0 to 12, with 0 indicating there is no DAC identified
with this particular source. Values 1 through 6 correspond to the six DAC BNC
outputs on the back of the IC6 labeled DAC 1 to DAC 6. DAC outputs 7 to 12
require the optional DAC outputs card.
SHUTTER OUTPUT. . . . . . . . . . . . . 0 to 38
CAUTION
Do not change Source Shutter output assignments while
a process is running. Doing so will result in incorrect
operation of the source shutter.
This parameter designates which of the 38 outputs is to be used as the Source
Shutter relay. Values range from 0 through 38. 0 indicates that a shutter is not
used and values 1 through 38 correspond to the appropriate relay or open
collector type output. The default value is 0. If a value other than 0 is entered
the relay chosen as the Source Shutter relay is designated as such in the