Chapter 1 introduction and specifications, 1 introduction, 1 related manuals – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
The IC6 is a closed loop process controller designed for use primarily in physical
vapor deposition. The IC6 monitors and/or controls the rate and thickness of the
deposition of thin films. Deposition rate and thickness are inferred from the
frequency change induced by mass added to a quartz crystal. This technique
positions sensors in the path between or to the side of the source of the vaporized
material and the target substrate. The sensor incorporates an exposed oscillating
quartz crystal whose frequency decreases as material accumulates. The change
in frequency provPN 074-505-P1Fides information to determine rate and thickness
and to continually control the evaporation power source. With user programmed
time, thickness and power limits and with desired rates and material
characteristics, the IC6 is capable of automatically controlling the process in a
precise and repeatable manner. User interaction is accomplished via the IC6 front
panel or remote communication and consists of selection or entry of parameters to
define the process.
A complete system consists of a main electronics unit also called the IC6, sensor
heads and a crystal interface unit (XIU) for each attached sensor. These items are
generally bundled at the factory and are also sold separately.
This IC6 Operating Manual provides user information for installing, programming
and operating the main electronics unit.
When reading the IC6 Operating Manual, please pay particular attention to the
Notes, Cautions, and Warnings found throughout the text. The Notes, Cautions,
and Warnings are defined in
.
You are invited to comment on the usefulness and accuracy of this manual by
visiting our website at
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1.1.1 Related Manuals
Sensors are covered in separate manuals.
074-154 - Front Load Bakeable
074-155 - CrystalSix (XtalSix)
074-398 - Crystal12 (Xtal12)
074-156 - Front Load Single/Dual
074-157 - Sputtering