INFICON IC6 Thin Film Deposition Controller - Manual (Page 99)

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IC6 Operating Manual
 Ending Thickness kÅ (Float)
 Average Rate Å/s (Float)
 Average Rate Deviation Å/s (Float)
 Ending Power % (Float)
 Average Power % (Float)
 Where it goes next (Byte):
 0 = NonDeposit Control or NonDeposit Hold
 1 = Post Deposit
 2 = Stop
 Termination Reason (Byte) (Matches the "Cause of Stop" Remote encoding
comm, see
section 15.4, STOP messages, on page 15-7 :
 128 = Normal termination,
 127 = Manual source shutter closing,
 126 = Suspend)
 Time Power Flag (Byte) (0 = No, 1 = Yes)
 Power Fail Flag (Byte) (0 = No, 1 = Yes)
 Power Fail Thickness kÅ (Float) (0 if not a power fail, otherwise the thickness
when the power was lost.)
NOTE: If Data Log Xtal Info Parameter is set to Yes, the following Crystal History
will be sent for each sensor, see Table 3-3 . The Crystal history contains the
history of every crystal in every sensor used in the layer. In the Remote
status command SL17, the crystal history for all twelve crystals in all eight
sensors is returned. If the Data Log Xtal History Parameter is set to no, all
zeros are sent in the remote status command SL17.
Table 3-3 is extended as necessary to show all crystals in a sensor.
Table 3-3 Sensor 1 to 8
Crystal Begin
Freq
End Freq BegLife EndLife Beg Activity End Activity Stability
Value
Quality
Value
1
2
3
4
5
6