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5 logic statement example – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

9.5 Logic Statement Example

The logic statement capability of the IC6 allows for automation of a thin film
process. For example, it is possible to start a process without manually pressing
START. One way to accomplish this is:

IF:

PROCESS END ANY AND LAYER END ANY

THEN:

START

The STOP can be added to assure that the process does not start again if it was
stopped.

To enter this statement follow this procedure:

1

On the MAIN MENU screen, make sure the state is READY. If it is not, press
STOP, then press RESET.

2

Move the cursor to Logic, then press the MENU key.

3

Using the down arrow, move to one of the Logic x-y pages.

4

From the Logic x -y page, press the right arrow key to move to the statements.

5

Place the cursor on any blank logic statement, using the up and down cursor
keys.

6

Press F1 EDIT.

7

Press F1 EVENT/ACTION.

8

Cursor to LAYER END. Press F3 INSERT. In the upper left of the screen,
LAYER END ### will appear after IF.

9

Cursor to PROCESS END. Press F3 INSERT. PROCESS END ### ccc LAYER
END ### will appear after IF.

10

Press F1 IF/THEN.

11

Cursor down to THEN. Press F1 EVENT/ACTION.

12

Cursor down to START. Press F3 INSERT. Press F1 IF/THEN.

13

Cursor to PROCESS END. Press F1 EVENT/ACTION. Press F4 NEGATE. A
bar will appear above PROCESS END.

14

Press F1 IF/THEN.

15

Cursor to ###. Press 0, Enter. ### will be replaced by ANY.

16

The cursor should now be on ccc. Press TOGL once to change the ccc to AND.
Press Enter.

17

Cursor to ###. Press 0, Enter. The ### will be replaced by ANY.

18

Press F4 SAVE & EXIT to return to the Logic page. At this point the Logic
Statement is entered into memory.