INFICON IC6 Thin Film Deposition Controller User Manual

Page 117

5 - 9

IC6 Operating Manual

Desired process change when the sensor fails. PostDp (1) continues into
post-deposit states. In Stop (2), all source control voltages will be set to
zero. In Suspend (3), only the associated layer will enter the suspend state.
It’s source control voltage will be set to zero. TimePw (4) continues to Final
Thickness using stored average power and rate. This cannot be updated
when a transfer or backup sensor is running. The default setting is Unused
(0) except for Sensor 1 which is Stop (2) if it is a single sensor.

All sensors except those designated Unused are averaged and weighted
together to calculate the layer rate and thickness.

NOTE: When using either the double-start (that is, pressing the START key

twice) or the codeposition feature, a sensor may not be used by two
layers each in Deposit at the same time. If this is attempted, a
sensor conflict error will occur and the IC6 will enter the STOP
state. If one layer is in either a pre-Deposit or post-Deposit state,
and the other layer in Deposit, the layer in Deposit has use of the
sensor. Once both layers are started, a sensor cannot be enabled
if it is used by the other material.

(SENSOR) FAILURE TRIGGEROnFail (0), Last (1)

Determines when the Failure Action is initiated. Select OnFail (0) to
initiate Failure Action when this sensor fails. Select Last (1) to initiate
Failure Action only if this sensor is the last one to fail. This cannot be
updated when a transfer or backup sensor is running. Default is Last
(1).

(SENSOR) WEIGHT . . . . . 1.0 to 400.0%

The Sensor Weight parameter is used to gauge the relative importance
of each sensor's measured rate in calculating a weighted average
aggregate rate. The default value is 100%.

If the WEIGHT parameter for a sensor is changed, the new WEIGHT for
this sensor will be used for subsequent calculations of the aggregate
rate, if the sensor’s Failure Action is not "Unused". Field will be
inaccessible if unused (0) failure action.

NOTE: This parameter affects the aggregate rate calculation. The

aggregate thickness accumulated thus far is not re-scaled
based on the change to the weighting factor.

(SENSOR) TOOLING . . . . 1.0 to 999.9%

The Sensor Tooling factor is used to account for the geometric tooling
factor of each sensor. The default value is 100%.