2 cross talk calibration manual display, 1 function key selection choices – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
12.6.2 Cross Talk Calibration MANUAL display
Upon pressing the TOGGLE MANUAL function key while in MAINT STOP, the IC6
enters the Manual state, allowing manipulation of the source power level using the
Hand-Held Controller. This is used to prepare the source for calibration. Bring the
source power level to a point where the deposition rate is stable and approximately
the rate at which you wish to calibrate. Upon entering the MANUAL state, Source
and Sensor shutters will activate. Rates and Thicknesses for each of the sensors
being calibrated will also be displayed. The Aggregate Rate, Thickness, and
% Power are also displayed.
Figure 12-9 Crosstalk manual display
12.6.2.1 Function Key Selection Choices
Key
Function
Description
F2
TOGGLE CALIBRATION
When the power level and rates are stable press
F2 TOGGLE CALIBRATION to enter the automatic
calibration portion of Cross Talk Calibration. Press it
again to return to the MANUAL state.
F1
TOGGLE MANUAL
Press this key to leave the Cross Talk Calibration
Manual display and return to the Cross Talk
Calibration Maint Stop display.
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