INFICON IC6 Thin Film Deposition Controller - Manual (Page 219)

10 - 49
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
28
(0x1c)
Default Process # Range is 1 to 50
Removes all layers of the specified process.
29
(0x1d)
Soak Hold Pre Con
on
Material Range is 0 - 32 (0 = All Materials)
30
(0x1e)
Soak Hold Pre Con
off
31
(0x1f)
Start Inhibit On Disallows a Start command to be executed.
32
(0x20
Start Inhibit Off Allows a Start command to be executed.
33
(0x21)
RateWatcher
Sampling Inhibit On
Will immediately cause the Deposit state to leave sampling and
not return until turned off.
34
(0x22)
RateWatcher
Sampling Inhibit Off
Allows the Deposit state to go into the RateWatcher algorithm.
35
(0x23)
RateWatcher Sample
Initiate On
>
Allows the Deposit state to enter RateWatcher sampling
36
(0x24)
RateWatcher Sample
Initiate Off
>
Turns RateWatcher sampling off.
37
(0x25)
Clear Q and S counts
for sensor X
Clear Q and S counts for specified sensor X
38
(0x26)
Name Material
Entry>
Give material number (1-32) the name
corresponding to material entry (0-254). Library
entries range from 0 (Ag) to 254 (ZrO
2
), with numbers
correcponding to the alphabetical listing in the library. The
density and Z-Ratio will be changed accordingly.
Table 10-15 Remote general (continued)
RG
Command
ID
Meaning
Action Value Notes