INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
3.3.8.2 DACs Page
Polarity and full scale voltage for all DAC outputs are configured here. 0 output
corresponds to 0 Volts. See
section 7.3, DACs Page Parameters, on page 7-3
.
3.3.8.3 Comm Page
Datalogging of crystal data is enabled here and RS232 and optional Ethernet
parameters are entered.
Datalog Xtal Info
RS232 / Baud Rate/ Protocol
Ethernet / IP Address/ Net Mask
See
section 7.4, COMM Page Parameters, on page 7-4
.
3.3.8.4 Message Page
Ten messages of up to 19 characters each can be entered. Display of messages
can be turned on and off using Logic statements.
See
section 7.5, MESSAGE Page Setup, on page 7-6
3.3.8.5 Date/Time Page
Toggle between date formats and enter the current date and time.
Date Format . . . . . . . . . . . . . . . . . . . Calendar / Day / Month / Year
System Time . . . . . . . . . . . . . . . . . . See
section 7.6, DATE / TIME Set Up, on
3.3.8.6 Test Page
Allows executing the programmed layer sequence with a dummy rate signal.
Test. . . . . . . . . . . . . . . . . . . . . . . . . . On/Off
Time Compressed . . . . . . . . . . . . . . No/Yes to speed up all times by factor of 10
Advanced Test . . . . . . . . . . . . . . . . . On/Off. Responds to crystal failures in "On"
mode.
See
section 7.7, TEST Page Set Up, on page 7-8
3.3.8.7 Lock Page
Allows setting lock codes to prevent parameter changes or file access.
Program Lock Code / File Access Code
See
section 7.8, LOCK Page Code Setup, on page 7-9
.