INFICON IC6 Thin Film Deposition Controller - Manual (Page 61)

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IC6 Operating Manual
Operate Display Description
1 Aggregate Rate
2 Layer Thickness
3 Power Level
4 State of Layer
5 State Timer
6 Layer Currently In Process
7 Layer Timer
8 Material Being Deposited
9 Source Number In Use
10 Sensor Number(s) In Use
11 Crystal Position In Use
12 Graphical Display of Rate Deviation or Power
13 Process Being Executed & Process Time
14 Run Number
15 Date and Time
16 Message Area
17 Function Key Definitions
18 Crucible Position
During the OPERATE display, the function keys below the screen function as
explained in
Table 3-1 .
In addition to the standard operational screen, if the system is configured for
co-deposition, or multi-layer deposition, the operational screen will be divided to
show information for all layers as shown in
Figure 3-5 , Figure 3-6 or Figure 3-7 .
Table 3-1 Operate display function keys
Key Function Description
F1 ZERO
THICKNESS Pressing F1 resets the displayed thickness of the current layer and
the sensor thickness values to zero.
F2 TOGGLE
MANUAL Press F2 to put the layer in manual control so that the power level
is controlled by the Handheld Controller (
section 3.6.6 ). When in
Manual, press F2 again to remove the layer from the Manual state
and place it into the DEPOSIT state.
F3 SHOW ALL
LAYERS/
SHOW GRAPH Press F3 to toggle between showing all layers (if more are
running) or showing only one layer