INFICON IC6 Thin Film Deposition Controller User Manual

Page 126

5 - 18

IC6 Operating Manual

CAUTION

The Sensor must be positioned so the rate can be
monitored with the source shutter closed when going to
the non-deposit control state.

RAMP 1 RATE. . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s

Rate Ramp 1 is provided to effect an aggregate rate change while depositing a
Layer. The aggregate rate is ramped linearly from the original rate setpoint to
the New Rate 1 value over the time interval Ramp 1 Time. It is allowed to ramp
to a higher or a lower rate. The default value is 0.0.

START RAMP 1 . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ

This value sets the thickness at which to start the Rate Ramp. This thickness
value must be less than the Start Ramp 2 thickness value if the value of Start
Ramp 2 is non-zero. A value of zero disables the feature. The default value is 0.

RAMP 1 TIME . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This value determines the time period over which to ramp the rate from the
original rate to New Rate 1. The default value is 00:00.

RAMP 2 RATE. . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s

Ramp 2 Rate is provided to effect an aggregate rate change while depositing a
Layer. The aggregate rate is ramped linearly from the original Ramp 1 Rate
setpoint to the New Rate 2 value over the time interval Ramp 2 Time. It is
allowed to ramp to a higher or a lower rate. The default value is 0.0.

START RAMP 2 . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ

This value determines the thickness at which to begin Ramp 2 Rate. A value of
zero disables this feature. Start Ramp 2 thickness must be greater than Start
Ramp 1 thickness. Also, Ramp 2 Rate can not be started until the completion
of Ramp 1 Rate. If the thickness of Start Ramp 2 is exceeded while in Ramp 1
Rate, Ramp 2 Rate will begin immediately after Ramp 1 Rate The default value
is 0.

RAMP 2 TIME . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This value is the time interval over which the aggregate rate is ramped linearly
from New Rate 1 to New Rate 2. The default value is 00:00.