3 autotune manual display – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
12.5.3 AutoTune Manual Display
The AutoTune Manual display is entered from the AutoTune Maint Stop display by
selecting F1 START AUTO TUNE. To return to the AutoTune Parameters display,
press F2 AUTO TUNE PARAMETERS.
The AutoTune Manual display is similar to the general Operate display with the
exception that Thickness and Process information will be absent. The AutoTune
Manual display automatically places the instrument into the MANUAL state. Just
like the normal MANUAL state, the power level can be adjusted via the Hand-Held
Controller and the source shutter relay is active.
Figure 12-3 AutoTune manual display
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