INFICON IC6 Thin Film Deposition Controller - Manual (Page 330)

A - 6
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
162 PbSnO
3
8.100 *1.000 lead stannate
163 PbTe 8.160 0.651 lead telluride
164 Pd 12.038 0.357 palladium
165 PdO 8.310 *1.000 palladium oxide
166 Po 9.400 *1.000 polonium
167 Pr 6.780 *1.000 praseodymium
168 Pr
2
O
3
6.880 *1.000 praseodymium oxide
169 Pt 21.400 0.245 platinum
170 PtO
2
10.200 *1.000 platinum oxide
171 Ra 5.000 *1.000 radium
172 Rb 1.530 2.540 rubidium
173 RbI 3.550 *1.000 rubidiurn iodide
174 Re 21.040 0.150 rhenium
175 Rh 12.410 0.210 rhodium
176 Ru 12.362 0.182 ruthenium
177 S
8
2.070 2.290 sulfur
178 Sb 6.620 0.768 antimony
179 Sb
2
O
3
5.200 *1.000 antimony trioxide
180 Sb
2
S
3
4.640 *1.000 antimony trisulfide
181 Sc 3.000 0.910 scandium
182 Sc
2
O
3
3.860 *1.000 scandium oxide
183 Se 4.810 0.864 selenium
184 Si 2.320 0.712 silicon
185 Si
3
N
4
3.440 *1.000 silicon nitride
186 SiC 3.220 *1.000 silicon carbide
187 SiO 2.130 0.870 silicon (ii) oxide
188 SiO
2
2.648 1.000 silicon dioxide
189 Sm 7.540 0.890 samarium
190 Sm
2
O
3
7.430 *1.000 samarium oxide
191 Sn 7.300 0.724 tin
192 SnO
2
6.950 *1.000 tin oxide
193 SnS 5.080 *1.000 tin sulfide
194 SnSe 6.180 *1.000 tin selenide
195 SnTe 6.440 *1.000 tin telluride
196 Sr 2.600 *1.000 strontium
197 SrF
2
4.277 0.727 strontium fluoride
Table A-1 Material table (continued)
Code Formula Density Z-Ratio Material Name