INFICON IC6 Thin Film Deposition Controller - Manual (Page 73)

3 - 19
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
3.3.6.6 Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-Displays
These three libraries allow convenient selection of a material by its chemical
formula along with the correct density and Z-Ratio values. Cursor to a Material
formula, then press F1 Define Material to select that material. The Material/Source
display will be shown where the remaining parameters can be entered. See
section
5.1.2, Material Definition, on page 5-2 .
3.3.7 Process
This display is organized into three pages described below. See Chapter 6,
Process Setup , for programming detail and page displays.
3.3.7.1 Overview Page
The Process Overview display, see Figure 3-14 , shows all 50 processes.
Processes with layers are identified by an > preceding the process name.
Cursoring to a Process and selecting it with F1 displays the layer sequence in the
process. Cursoring to a Process and pressing F2 makes that Process the active
Process. This process’ layer sequence will be executed when a Start is activated.
Figure 3-14 Process overview display
Press F4 to clear a Process of all programmed values. Move the cursor to a
Process to be cleared.
Press F4 Default Process. This will set the Process parameter values, including its
name, to their default values as well as remove all layers from the process.