1 front load – INFICON IC6 Thin Film Deposition Controller User Manual
Page 296
15 - 26
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
15.8.1 Front Load
Follow the procedure below to replace the crystal in the Front Load sensor: (see
1
Gripping the crystal holder with your fingers, pull it straight out of the sensor
body.
2
Gently pry the crystal retainer from the holder (or use the Crystal Snatcher; see
).
3
Turn the retainer over and the crystal will drop out.
4
Install a new crystal, with the patterned electrode face up.
5
Push the retainer back into the holder and replace the holder in the sensor
body.
Figure 15-1 Front load crystal sensor (exploded)
Front Load Crystal Holder
(IPN 750-172-G1)
Front Load Standard
Crystal Sensor Body
(IPN 750-207-G1)
Crystal (IPN 008-010-G10)
Fully Coated Face (Gold)
Finger Spring Contact
(IPN 750-171-P1)
Crystal Retainer
(IPN 007-023)
In-Vacuum Cable
To XIU
Water Tubes
- TGF10 Tracer Gas Filler (36 pages)
- Sensistor ILS500 F Leak Detection Filler (90 pages)
- T-Guard Leak Detection Sensor (85 pages)
- T-Guard Leak Detection Sensor Interface description (40 pages)
- Sensistor ISH2000P Hydrogen Leak Detector, Panel Model (51 pages)
- Sensistor ISH2000 HySpeed Hydrogen Leak Detector (54 pages)
- LDS3000 Modular Leak Detector (52 pages)
- LDS3000 Modular Leak Detector Interface description (56 pages)
- BM1000 Bus module (14 pages)
- I/O1000 I/O module (18 pages)
- CU1000 Control unit (24 pages)
- Helium Leak Detector Modul1000 (130 pages)
- Helium Leak Detector Modul1000 Interface description (40 pages)
- UL5000 Dry Helium Leak Detector (108 pages)
- UL5000 Dry Helium Leak Detector Interface description (14 pages)
- UL1000 Fab Dry Helium Leak Detector (119 pages)
- HLD6000 Refrigerant Leak Detector (76 pages)
- HLD6000 Refrigerant Leak Detector Interface Description (40 pages)
- IO1000 I/O module (18 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector (92 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description (36 pages)
- Sensistor XRS9012 Hydrogen Leak Detector User Manual (28 pages)
- Sensistor XRS9012 Hydrogen Leak Detector Maintenance manual (14 pages)
- Extrima Ex-certified Hydrogen Leak Detector (62 pages)
- Sensistor ILS500 Leak Detection System (107 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (58 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (108 pages)
- Sensistor Sentrac Hydrogen Leak Detector (86 pages)
- Protec P3000(XL) Helium Leak Detector (132 pages)
- Pilot Plus Vacuum Gauge (2 pages)
- CO Check Carbon Monoxide Meter (2 pages)
- GAS-Mate Combustible Gas Leak Detector (12 pages)
- Whisper Ultrasonic Leak Detector (8 pages)
- Vortex AC Refrigerant Recovery Machine 115V (20 pages)
- Vortex AC Refrigerant Recovery Machine 230V (16 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (2 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (44 pages)
- D-TEK CO2 Refrigerant Leak Detector (12 pages)
- TEK-Mate Refrigerant Leak Detector (12 pages)
- Compass Refrigerant Leak Detector (12 pages)
- D-TEK Select Refrigerant Leak Detector (12 pages)
- Explorer Portable Gas Chromatograph (369 pages)
- MicroFID II Portable Flame Ionization Detector (89 pages)
- DataFID Portable Flame Ionization Detector for Landfill Emissions Monitoring (91 pages)
- Hydrostik Hydrogen Fuel Cylinder Installation (7 pages)