INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

Digital I/O Display. When running a layer containing the source for which the
Shutter Output parameter is programmed, the logic condition is set to be true
when the Layer is in DEPOSIT, TIME POWER, RATE RAMPS or MANUAL.
The condition remains true until the end of DEPOSIT or until a STOP command
is received. The same output may be used for multiple shutters.

NUMBER OF CRUCIBLES . . . . . . . One(0), Four(1), Eight(2), 16(3), 32(4), 64(5)

Values in brackets are for use with remote communication commands. Refer to

section 3.6.2, Source/Crucible Selection, on page 3-37

for an example of

programming Turret source crucible selection. This parameter can be used to
automatically index the turret position when using a multiple pocket turret
source. The value is selected using the TOGL and ENTER keys. The default
value is 0 and indicates a single pocket source. If a 0 is chosen, the parameters
Crucible Output, Turret Feedback and Turret Delay or Turret Input are grayed
out on the Display. The number of crucibles determines the number of relays
needed for the crucible output. As the relays are binary encoded (actual coding
is binary - 1, with 000 representing position 1 and 111 representing position 8),
2 relays are needed for 4 crucibles, 3 for 8, 4 for 16, 5 for 32 and 6 for 64.

CRUCIBLE OUTPUT. . . . . . . . . . . . 0 to 37

This parameter designates which of the outputs are to be used as Crucible
Outputs. Values range from 0 to 37. The default is 0 and indicates the Crucible
Output is inactive. The value entered into this parameter indicates which of the
outputs begins the sequence of outputs used as crucible control outputs. For
example, a Four(1) entered into the Number of Crucibles parameter and a 1
entered into the Crucible Output parameter will designate output relays 1 and
2 as crucible control outputs with the least significant bit of the binary coding in
relay output 1. An Eight(2) entered into the Number of Crucibles parameter and
a 1 entered into the Crucible Output parameter will designate output relays 1,
2, and 3 as crucible control outputs with the least significant bit of the binary
coding in relay output 1.

TURRET FEEDBACK . . . . . . . . . . . Yes (1), No (0)

Some turret source indexers provide feedback to signify when the turret is in
the proper position. This parameter allows the IC6 to accept this input and
respond accordingly. Parameter entry may be either Yes or No. Yes indicates
that Turret Feedback is expected and the Turret Input parameter is displayed
on the screen. No indicates there is no Turret Feedback. The default value is
No. See the Turret Input and Turret Delay descriptions below.

NOTE: If the turret feedback is set to Yes and the Process is STARTed, the IC6

will proceed to the CRUCIBLE SW state. If the turret input is not
received within the Turret Delay time, the process will STOP.