INFICON IC6 Thin Film Deposition Controller - Manual (Page 85)

3 - 31
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
F
igu
re 3-21 Si
mplified
IC6 st
ate
se
quen
ce diag
ram
ST
OP
ST
OP
NO
NO
NO
ON
YE
S
YE
S
YE
S
ON
/STB
Y
STB
Y/P
o
w
er
FAIL
ST
ANDB
Y
RESE
T
YE
S YE
S
NO NO
NO
SA
VE
CURRENT PROCESS
DA
TA
TURRE
T DELA
Y
TIME OUT
CRUCIBLE
IN
POSITION
?
t MEMOR
Y CHECKS
t READ
C
O
NFIGURA
TION
SWIT
C HES
t REST
ORE CURRENT
PROCESS V
A
LUES
PREC
ONDITION RISE
PREC
ONDITION SO
AK
RISE TIME
1
SOURCE SWIT
CH
SAME SOURCE AND
CRUCIBLE
?
IDLE
POWER ZERO
?
t LO
AD FILM
PARAME
TERS
SO
AK
TIME
1
SO
AK
HOLD INPUT
?
RISE TIME
2
SO
AK
TIME
2
SO
AK
HOLD 2 INPUT
?
SHUT
TER
DELA
Y
?
SHUT
TER
DELA
Y
SHUT
TER
DELA
Y
?
CO
N
TR
O
L
DELA
Y
YE
S
YE
S
NO
MPWR
SE
T LA
YER
TO ST
AR
T
)
)
)
)
)
YE
S
YE
S
A
A
NO
NO NO
NO
NO
YE
S
YE
S
YE
S
YE
S
NO
ST
AR
T
or
A
u
to
Star
t
Nex
t=Y
es
READ
Y
IDLE
INCREMENT
LA
YER NUMBER
IF NO
T READ
Y
OR
ST
OP ST
ATE
WA
S
TIME POWER USED
?
IDLE RA
MP
TIME FEED TIME FEED RA
MP
ON FINAL
THK
DECISION DA
TA
LO
G
UPD
ATE
THICKNESS
FINAL
TIME ELAPSED
X TAL F
AIL
TIME
ELAPSED FINAL THK X TAL F
AIL
?
RA
TE
RA
MP
FINAL THICKNESS
RA
TE RAMP
THICKNESS
X
TAL F
AIL
FINAL THK THK LIMIT X
TAL F
AIL
?
XT
A
L
SWIT
CH
SELEC
TED
?
DEPOSIT
RA
TE
W
AT
CHER
DEPOSIT
RE
TAIN
THICKNESS
AT
“ST
O
P ” V
A
LUE
ZERO
THICKNESS PROCESS CONTINUE
?
GOOD XT
A
L
?
SWIT
CH
XT
A
L
DESIRED
RA
TE = 0.0
YE
S NO
XT
SW
TIME POWER
SELEC
TED
?
“T
O
FAIL
URE
A C
TION
ST
ATE”
TIME POWER FINAL THICK
?
)