INFICON IC6 Thin Film Deposition Controller - Manual (Page 198)

10 - 28
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
24
(0x18)
Control Delay Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
Gray font unless Delay
option is set to control or
both.
25
(0x19)
Shutter Delay Accur
(%)
1/ 99/ 5 Integer Gray font unless Delay
option is set to shutter or
both.
26
(0x1a)
Transfer Sensor 0/ 8/ 0 Integer 0 = No transfer sensor.
Gray font unless delay option is set to shutter or both and
transfer service is not set to 0. Update not allowed if
material is running.
27
(0x1b)
Transfer Tooling
(%)
1.0/ 999.9/
100.0
REAL_4X1
28
(0x1c)
Feed Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
29
(0x1d
Feed Ramp Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
30
(0x1e)
Feed Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
31
(0x1f)
Idle Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
32
(0x20)
Idle Ramp Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
33
(0x21)
Rate
(Å/s) 0/ 999.9/ 0 REAL_
4F31
34
(0x22)
Time Limit
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
35
(0x23)
Rate Filter Time
(seconds)
0/ 6/ 0 Encode 0 = 0.1 1 = 0.4 2 = 1.0
3 = 4.0 4 = 10.0
5 = 20.0 6 = 30.0
36
(0x24)
Time Power Avg
Time (Minutes)
0/ 30/ 0 Integer
37
(0x25)
Ion Assist Deposit 0/ 1/ 0 Encode 0 = No, 1 = Yes Update not allowed if
material is running.
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes