3 troubleshooting computer communications – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
15.7.3 Troubleshooting Computer Communications
7. Large drift in thickness
(greater than 200 Å for a density
of 5.00 g/cc) after termination of
sputtering
a. Crystal heating due to poor
thermal contact
a. Clean or polish the crystal
seating surface on the crystal
holder
b. External magnetic field
interfering with the sensor's
magnetic field (sputtering
sensor)
b. Rotate sensor magnet to
proper orientation with external
magnetic field, refer to the
sputtering sensor manual IPN
074-157
c. Sensor magnet cracked or
demagnetized (sputtering
sensor)
c. Check sensor magnetic field
strength, the maximum field at
the center of the aperture should
be 700 gauss or greater
8. XtalSix, Xtal12, or Generic
crystal switch problem (does not
advance or not centered in
aperture)
a. No relay or incorrect relay
output programmed
Program relay
b. Loss of pneumatic supply, or
pressure is insufficient for proper
operation
b. Ensure air supply is regulated
at 80-90 psi
c. Operation has been impaired
as a result of material
accumulation on cover
c. Clean material accumulation
as needed, refer to XtalSix
manual IPN 074-155 for
maintenance
d. Improper alignment
d. Realign as per instructions in
XtalSix manual IPN 074-155
e. 0.0225" diameter orifice not
installed on the supply side of
solenoid valve assembly
e. Install orifice as shown in the
XtalSix manual IPN 074-155
Table 15-8 Troubleshooting Transducers/Sensors (continued)
SYMPTOM
CAUSE
REMEDY
Table 15-9 Troubleshooting computer communications
SYMPTOM
CAUSE
REMEDY
1. Communications cannot be
established between the host
computer and the IC6
a. Improper cable connection a. Verify for correct cable
b. BAUD rate in host computer
not the same as the IC6
b. Verify BAUD rate in the
host's applications program,
verify BAUD rate in the IC6
c. Incompatible protocols being
used
c. Verify that the IC6 protocol:
RS232, DATALOG, matches
host