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5 multiple layer starts, 6 automating a process – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

3.4.5 Multiple Layer Starts

It is possible to run up to six layers independent of each other at the same time by
pressing START six times, but ratio control and cross-sensitivity will not be active.
Alternatively, two or three instances of co-deposition are also possible by pressing
START two or three times, respectively. The Max Concurrent Layer parameter in
the GENERAL/PROCESS page must be set appropriately, see

section 7.2,

General Screen Process Page, on page 7-1

.

3.4.6 Automating a Process

A process can be automated so that a complete process can be executed without
having to press START between all the layers. A process can be automated by any
of the following three methods.

Setting Auto Start Next in the GENERAL/PROCESS page to Yes will cause a
complete process to run by pressing START once.

Remote communication control. An external computer could be set up to
monitor the status of a process and issue START commands at desired times.
(See

Chapter 10, PN 074-505-P1F Remote Communications

.)

Remote input line. A remote input line can be configured by use of a logic
statement to START a layer based on some external event. (See

Chapter 9,

Logic Statement Setup

.)