INFICON IC6 Thin Film Deposition Controller User Manual

Page 156

9 - 8

IC6 Operating Manual

BKUP SENS IN USE

Sets the logic condition to be true while a backup sensor is in use. The condition
remains true until a backup sensor is no longer active.

COMPUTER CNTRL

Sets the logic condition to be true when a Set Logic Statement vvv (1 to 100)
command is received from the remote communications port. The logic
condition remains true until a Clear Logic Statement vvv command is received
from the remote communications port. See Remote Commands RG5 and RG6
(see

section 10.4.33, Remote General Action, on page 10-47

COUNT LIMIT XX yyy (xx can be 1 to 20 and yyy can be 0 to 999)

Sets the logic condition to be true when the specified counter XX (1 to 20) has
reached the count number set by yyy (1 to 999). The condition remains true
until the specified counter is cleared using Clear Counter XX.

CRUC SW FAIL

Sets the logic condition to be true if a Turret Feedback input is specified and is
not received within the allocated time span. The condition remains true until the
input arrives or a Reset is done.

CRUC SWITCH

Sets the logic condition to be true while switching crucibles. The condition
remains true until the turret delay time has expired or the turret input arrives or
a Reset is done.

DEPOSIT

Sets the logic condition to be true at the beginning of the Deposit state. The
condition remains true until the end of the DEPOSIT state, or when a
STOP/RESET or STOP/START sequence is executed. Rate Ramps, Time
Power and Manual are considered part of the Deposit state.

EXTERNAL INPUT ## (## can be 1 to 28)

Designates a hardware input which, when it changes state, can be used to
trigger an Action. Inputs can be given names up to 15 characters long. Inputs
are activated by pulling the specific input’s terminal to ground (<0.8 V) through
a contact closure to common (GND) or with TTL/CMOS logic having current
sink capability of 2 mA (1 low power TTL load).

FEED

Sets the logic condition to be true at the start of Feed Time. The condition
remains true until the end of Feed Time. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.