INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
4
Press F1 START AUTOTUNE and increase the power level with the Hand-Held
Controller until the rate is approximately one half the desired rate.
5
Allow the source to come to an equilibrium by leaving the power level constant
for approximately three minutes.
6
When the source has reached equilibrium, press the F1 START TUNING and
observe the instrument as it goes through the "tuning" portion of AUTOTUNE.
7
When AutoTune is completed, the instrument will automatically return to the
AutoTune Parameters display and the newly calculated values will be displayed
next to the old values. The user then has the option to F3 ACCEPT or F4
REJECT the new control loop values. Accepting the changes replaces the old
parameters with the new values, while rejecting the changes leaves the old
values in place.
8
An AUTOTUNE failure means the IC6 was unable to consistently measure the
system's response characteristics.
NOTE: To ensure a successful AutoTune, there are a few items to be
considered:
A well-conditioned source is imperative. Be certain the source will
be able to withstand the automatic power increments without
spitting or other damage occurring to the system.
A "quiet" crystal is essential. Rate noise and gun arcs will cause
AutoTune Failures.
Use the Maximum Rate and Maximum Power limits to protect your
equipment.
Do not set the Maximum Rate at exactly twice the Desired Rate.
Allow for overshoot.
for messages that may be displayed during the Auto
Tune process.