INFICON IC6 Thin Film Deposition Controller - Manual (Page 287)

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IC6 Operating Manual
15.7.1 Troubleshooting the IC6
Table 15-7 Troubleshooting the IC6
SYMPTOM CAUSE REMEDY
1. Power on LED not illuminated a. Blown fuse/circuit breaker
tripped
a.Have qualified personnel
replace fuse/reset circuit
breaker
b. Electrical cord unplugged
from wall or back of IC6 b. Reconnect power cord
c. Incorrect line voltage c. Have qualified personnel
verify line voltage, verify the IC6
is configured for the correct
voltage
2. IC6 "locks" up a. Cover or back panels not
attached to the IC6 a. Ensure all covers and panels
are in place and securely
fastened
b. High electrical noise
environment b. Reroute cables to reduce
noise pickup (1 ft away from high
power conducting lines makes a
sizable reduction in the amount
of noise entering the IC6), keep
all ground wires short with large
surface area to minimize ground
impedance
c. Poor grounds or poor
grounding practice c. Verify proper earth ground,
use appropriate ground strap,
eliminate ground loops by
establishing the correct system
grounding, verify proper IC6
grounding
3. IC6 does not retain
parameters on power down (loss
of parameters on power up) a. Faulty static RAM a. SRAM battery has a normal
life expectancy of ten years,
contact INFICON service
department
b. Power supply problem b. Contact INFICON service
department
4. Some keys on front panel
function while others do not a. Faulty keypad or faulty
keypad ribbon cable a. Contact INFICON service
department
5. All keys on the front panel fail
to function a. IC6 is "locked" up a. Turn power to OFF or to
STBY, then to ON, see item 2
above