INFICON IC6 Thin Film Deposition Controller - Manual (Page 193)

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IC6 Operating Manual
Process End XXX Process #
0 = Any
0 50 0x67 0x99
Last Layer 0x68 0x98
Timer Minutes
(See Notes 2 & 3)
Timer # 1 20 Number of
minutes
00:00 99:59 0x69 0x97
Timer Seconds
(See Note 1)
Timer # 1 20 Time in Tenths
of Seconds
0 999.9 0x6A 0x96
Count limit Counter # 1 20 Counter value 0 999 0x6B 0x95
Statement Logic
Statement
#
1 100 0x6C 0x94
Xtal Fail Sensor #
0 = any
0 8 0x6D 0x93
Xtal Switching Sensor #
0 = any
0 8 0x6E 0x92
Max Power 0x6F 0x91
Min Power 0x70 0x90
Not Used 0x71 0x8F
BkupSens In Use 0x72 0x8E
Ion Assist Dep 0x73 0x8D
Auto-Z Fail Sensor #
0 = any
0 8 0x74 0x8C
Cruc Sw Fail 0x75 0x8B
Rate < 0.1 0x76 0x8A
Shutter Dly Error 0x77 0x89
Not Used 0x78 0x88
XferSnsr In Use 0x79 0x87
Xtal Life > xxx Sensor #
% Life
0 = any
0 8 % Life 1 99 0x7A 0x86
Xtal Activity < xxx Sensor #
Activity
0 = any
0 8 Activity 1 999 0x7B 0x85
Computer Cntrl 0x7C 0x84
Table 10-7 Event list (continued)
Events 1st
numeric
(1 Byte)
(XXX)
Min Max 2nd
numeric
(Integer)
(YYY)
Min Max Logic
Code
Logic
Code
Negated