INFICON IC6 Thin Film Deposition Controller - Manual (Page 34)

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IC6 Operating Manual
1.4.5 DAC Outputs
Quantity and Type . . . . . . . . . . . . . . 6 with BNC, 6 optional with 15 pin miniature
D-sub providing analog outputs for Rate and
Thickness.
Configuration . . . . . . . . . . . . . . . . . . User programmable for recorder
or source control.
Function and Ranges . . . . . . . . . . . . Power, Rate, Rate Deviation, Thickness
Full scale voltage value fully selectable up to
+ or - 10V relative to 0 V at 0 output
Current rating . . . . . . . . . . . . . . . . . . 20 mA per channel
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)
Update Rate . . . . . . . . . . . . . . . . . . . 10 Hz, maximum, (dependent on source
characteristics).
Recorder Output Functions . . . . . . . Aggregate Rate, Thickness or Rate
Deviation; Individual Sensor Rate, Thickness
or Rate Deviation; or Source Power.
Recorder Output Ranges
Rate . . . . . . . . . . . . . . . . . . . . . . 0 to up to 99999 Å/s programmable
Thickness . . . . . . . . . . . . . . . . . . 0 to up to 99999 Å programmable, [Function
modulo (Thickness Range, Thickness)output
is "saw-tooth" like with increasing thickness.]
Rate Deviation . . . . . . . . . . . . . . Desired rate ±50 Å/s
Accuracy . . . . . . . . . . . . . . . . . . . . . ±1% relative to Full Scale 10 V