INFICON IC6 Thin Film Deposition Controller User Manual

Page 121

5 - 13

IC6 Operating Manual

SOAK POWER 1 . . . . . . . . . . . . . . . 0.00 to 99.99%

This parameter is usually set to the power level at which the source material
just begins to melt. The IC6 ramps the power level from zero or Precon Soak
level if programmed to Soak Power 1 linearly over the time period Rise Time 1.
The default value is 0. See

section 3.6.6.1

for information on determining

appropriate Soak Power using the optional Handheld Controller (IPN
755-262-G1).

RISE TIME 1 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This parameter provides the time period over which the source power is
ramped from 0 or from Precon Soak Power if programmed to Soak Power 1.
The default values is 00:00.

SOAK TIME 1 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This parameter provides the time period for which the IC6 holds at
Soak Power 1. The default value is 00:00.

SOAK POWER 2 . . . . . . . . . . . . . . . 0.00 to 99.99%

This parameter sets the power level at which the rate from the source very
nearly matches the desired deposition Rate. The IC6 can ramp the power level
if programmed from zero, from idle power, from Soak Power 1 linearly to the
Soak Power 2 level over the time period RISE TIME 2. The default value is 0%.

RISE TIME 2 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This parameter sets the time period in which the IC6 linearly ramps the power
level from Soak Power 1 to Soak Power 2. The default value is 00:00.

SOAK TIME 2 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This parameter sets the time period for which the IC6 holds the power level at
Soak Power 2. The default value is 00:00.

AUTO SOAK 2 . . . . . . . . . . . . . . . . . Yes (1), No (0)

The Auto Soak 2 option, when enabled by selecting Yes (1), calculates an
average power setting over the last few seconds of the DEPOSIT state. This
average power replaces the value programmed in Soak Power 2 so the next
time this material is executed, the Soak Power 2 level is the Auto Soak 2 value.
In this manner the Soak Power 2 value closely matches the power level
required to achieve the desired deposition rate. The power is averaged over the
last 2.5 seconds of the deposition. The default value is No (0).

DEP AFTER PRE-DEP . . . . . . . . . . Yes (1), No (0)

Selects the state to follow the last Soak. Standard processing will continue with
Deposit. In special cases, No (0) or Non-deposit control may be appropriate. In
this state, the rate is controlled but thickness is not incremented and the source
shutter relay is not active. Default is Yes(1) for Deposit.