INFICON IC6 Thin Film Deposition Controller - Manual (Page 27)

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IC6 Operating Manual
1.4 IC6 Specifications
1.4.1 Measurement
Measurement Frequency Range . . . 6.0 to 4.5 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.0035 Hz @ 6 MHz
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.00433 Å @ tooling/density = 100/1
Fundamental frequency = 6 MHz
Measurement Interval. . . . . . . . . . . . 0.10 s
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical, (dependent on process
conditions, especially sensor location,
material stress, temperature and density)
Frequency Accuracy. . . . . . . . . . . . . ± 2 ppm 0 to 50°C
Measurement Frequency . . . . . . . . . 10 Hz
Measurement Technique . . . . . . . . . ModeLock with Auto-Z
User Interface. . . . . . . . . . . . . . . . . . LCD and limited membrane keypad. All
parameters accessible through computer
communications. Multiple message areas for
indication of states and detailed indication of
abnormal and stop conditions.
1.4.2 Screens and Hierarchy
a) Navigation . . . . . . . . . . . . . . . . . . Menu driven, four soft keys
b) Structure. . . . . . . . . . . . . . . . . . . . Separate screens dedicated to
1) Operate
2) Sensor Information
3) Sensor Parameters
4) Source Parameters
5) Material Parameters
6) Process Parameters
7) General Parameters
8) Digital I/O Display
9) Logic
10) Maintenance
11) Counter/Timer
12) USB Storage