INFICON IC6 Thin Film Deposition Controller User Manual

Page 288

15 - 18

IC6 Operating Manual

6. Control voltage output does
not function properly

a. DAC board damaged from
applying voltage to the control
voltage output

a. Ensure cable connection to
the DAC board does not have a
potential across the contacts,
contact INFICON service
department

b. Reversed polarity of control
voltage relative to that accepted
by the source power supply

b. Verify source output polarity of
the DAC and the required input
polarity of the source power
supply, refer to the instruction
manual to reconfigure the IC6 if
necessary

c. Improper control cable
fabrication

c.Check for correct cable wiring
in the appropriate section of the
manual

7. LCD display dull or blank

a. Brightness/contrast
adjustment required

a. Refer to manual for location of
adjustment potentiometer,
adjust as desired

b. LCD or power supply problem b. Contact INFICON service

department

8. Poor rate control

a. Control loop parameters
improperly selected

a. Refer to the instruction
manual section on tuning control
loop parameters

b. Electron beam sweep
frequency "beating" with the
IC6's measurement frequency

b. Adjust the sweep frequency
so it is not a multiple of the IC6's
measurement frequency

Table 15-7 Troubleshooting the IC6 (continued)

SYMPTOM

CAUSE

REMEDY