INFICON IC6 Thin Film Deposition Controller - Manual (Page 196)

10 - 26
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
10.4.16 Query Material Parameter
Command = QM
Command ID = See Table 10-9
Material Number = 1- 32
Response = |
Type of response depends on command ID, see Data Type column in Table 10-9 .
10.4.17 Update Material Parameter
Command = UM
Command ID = See Table 10-9 .
Material Number = 1- 32
Parameter Value = | Type of value depends on command ID,
see Data Type column in
Table 10-9 .
Response = None (Just header and trailer)
Table 10-9 Material parameters
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes
1
(0x01)
Density
(g/cc)
0.1/ 99.999/
1.0
REAL_5X3
2
(0x02)
Z-Ratio 0.1/ 15.0/
1.0
3
(0x03)
Master Tooling
(%)
1.0/ 999.9/
100.0
REAL_4X1
4
(0x04)
Control Loop 0/ 2/ 0 Encode 0 = NonPID 1 = PI
2 = PID
5
(0x05)
Process Gain
(Å/s/%)
0.01/
999.99/ 10.0
REAL_
5F32
6
(0x06)
Time Constant
(seconds)
0.01/
9999.99/ 1.0
REAL_
6F32
Gray font if Control Loop =
NonPID
7
(0x07)
Dead Time
(seconds)
0.01/
9999.99/ 1.0
REAL_
6F32
Gray font if Control Loop =
NonPID
8
(0x08)
Source 1/ 6/ 1 Integer Update not allowed if
material is running.
9
(0x09)
Maximum Power
(%)
0.01/ 99.99/
90.0
REAL_4X2