Figure 3-13 – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
material. If Multipoint is set to No, a Backup Sensor and its Tooling factor can be
specified. Other choices will be shown according to the Sensor Type. If the sensor
is a XtalTwo, the Tooling factor for the secondary crystal can be specified. In the
case of a multi-position rotary sensor head, the range of crystal positions to use can
be specified.
In addition, Quality and Stability settings are available to force a crystal switch to a
backup crystal or sensor when the primary crystal starts to become unstable.
Cal Thickness can be used to manually enter correction factors to subtract
crosstalk when multiple materials are being co-deposited. After performing the
Cross Talk calibration procedure entered from the Main Menu/Maintenance
screen, the correct values will be imported here and shown. See
.
Figure 3-13 Material sensor page
3.3.6.4 Pre/Post Page
Up to three pre-deposition phases with rise times, power levels and soak times can
be specified. Also, Auto Soak 2 can be enabled as well as Shutter or Control Delay.
See
section 5.1.5, Pre/Post Screen Deposit Page Parameters, on page 5-12
.
3.3.6.5 Deposit Page
Set the desired deposition rate, Time Limit, Rate Filter Time, Time Power Avg Time,
Ion Assist Deposit, and the state to enter after reaching Final Thickness.
Two new rates can be specified while in Deposit and RateWatcher can be enabled.
See