INFICON IC6 Thin Film Deposition Controller - Manual (Page 74)

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IC6 Operating Manual
3.3.7.2 Current Process
The Curr(ent) Proc(ess) display, see Figure 3-15 , shows the layer sequence for the
last process edited, not necessarily the Active Process. A 15 character name can
be entered here by cursoring to the Name and using the keys in cell phone style to
enter characters and numbers. See
section 6.3, Curr(ent) Proc(ess) Page, on page
6-2 .
Figure 3-15 Current process display
3.3.7.3 1 - 10, 11 - 20 etc. Screen
This screen shows the programmed layers in groups of 10. Layer parameters Final
Thick(ness), Thick Limit, Cruc(ible) number, CoDep (Yes/No) and related
parameters are entered here. With the cursor in the Material # column, enter the
material number to use for the first layer. To add to the layer sequence, with the
cursor in the Material # column use the down arrow key to move to the empty line
and enter the material number to use for that layer. See
section 6.4, Process
Layers 1 - 10 etc., on page 6-3 .
3.3.8 General
The General Process screen is organized into eight sub screens described below.
See Chapter 7, General Parameters for programming details and screen displays.
3.3.8.1 Process Page
The Process page shows global parameters and allows editing them.