INFICON IC6 Thin Film Deposition Controller - Manual (Page 75)

3 - 21
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Figure 3-16 Process page
Active Process . . . . . . . . . . . . . . . . specify which of the 50 processes to execute.
Layer To Start . . . . . . . . . . . . . . . . . when Start is initiated, this layer # will be
executed.
Source DAC Required . . . . . . . . . . specifies whether a Source DAC is required
for a layer to be active.
Auto Start Next . . . . . . . . . . . . . . . . start the next layer when a layer reaches Idle.
Max Concurrent Layer . . . . . . . . . . set to 1 to prevent accidental double Starts.
Layers Displayed . . . . . . . . . . . . . . maximum number of layers displayed on the
Operate screen.
Active Layer Output . . . . . . . . . . . . specify the first of 8 consecutive outputs to
indicate the number of the layer that will be
executed when Start is executed. If multiple
layers are active, the outputs will only
indicate the lowest numbered one.
Run Number . . . . . . . . . . . . . . . . . . increments at the start of a process.
Thickness Eq 1, 2 and 3. . . . . . . . . allows summing of thicknesses from up to 6
sources for use in conjunction with a logic
statement Thick Sum event.
See section 7.2, General Screen Process Page, on page 7-1