INFICON IC6 Thin Film Deposition Controller User Manual

Page 159

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IC6 Operating Manual

MAX POWER

Sets the logic condition to be true as long as any source is at Max(imum)
Power. The condition remains true until every source is less than Maximum
Power.

MIN POWER

Sets the logic condition to be true as long as any source is at Min(imum) Power.
The condition remains true until every source is greater than Minimum Power.

NON-DEP CONTROL

This Event is evaluated true if a layer is in the Non-Deposit Control state, that
is, there is rate control with the source/substrate shutter closed. The condition
remains true until the end of the Non-Deposit Control state.

NON-DEP HOLD

This function is similar to Time Power except the source/substrate shutter is
closed and there is no determinant end point. The condition remains true until
the state is exited, for example when a Stop command is given.

POST-DEPOSIT

Sets the logic condition to be true at the beginning of the Feed state or the
beginning of the Idle Ramp state. The condition remains true until a START
command is received or until a STOP/RESET sequence is executed.

NOTE: If Auto Start Next is enabled and there are no states (Feed, Feed

Ramp, Idle Ramp) between Deposit and Idle, this logic event is only
triggered at the End of Process and not between each subsequent
layer.

PRE-COND RISE

Sets the logic condition to be true at the beginning of the Pre-Cond Rise state.
The condition remains true until the Pre-Cond Soak or a subsequent non-zero
state is entered, or until a STOP/RESET sequence is executed.

NOTE: This state, PRE-COND SOAK, RISE 1 and SOAK 1 are skipped if the

same material was used in a previous layer and has a non-zero Idle
power. The next layer using this material will immediately proceed to
the Rise 2 state.