INFICON IC6 Thin Film Deposition Controller - Manual (Page 215)

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IC6 Operating Manual
10.4.32 Status Sensor
Command = SS
Command ID = See Description in Table 10-14 .
Sensor = Sensor number (0 - 8)
If the sensor number is zero the response will give the value for all eight sensors.
Response = See Data Returned in Table 10-14 .
Table 10-14 Status sensor
SS
Command
ID
Description
Number of
bytes in
the
response
Data Returned Notes
0
(0x00)
Crystal Life 1 or 8 or One byte for each sensor.
Range will be 0 - 100
1
(0x01)
Crystals
Remaining
1 or 8 or One byte for each sensor. Range between 0 and
12. Number of good crystals on a CrystalTwo,
Crystal6 or Crystal12 Sensor. Returns either a 0
(current crystal failed) or a 1 (current crystal good)
for a Singlesensor. The command is not intended
to be used for Generic sensor - returns NO_DATA .
2
(0x02)
Crystal
Position
1 or 8 or One byte for each sensor. Range between 1 and
12. The current crystal position on a CrystalTwo,
Crystal6 or Crystal12.
3
(0x03)
Sensor Status 1 or 8 or One byte for each sensor.
Bit1 Bit 0
0 0 Good Crystal
0 1 Failed Crystal
1 0 Invalid Measurement
on Crystal
1 1 Undefined
Bit 7 Bit 6
0 0 Auto-Z-Ratio
0 1 Sensor Z-Ratio
1 0 Material Z-Ratio
1 1 Undefined
4
(0x04)
Fundamental
Frequency
8 or 64 or
ong>
g>
One long integer for each sensor. Unconverted.
To convert to Hz, multiply by
0.000873114913702011
5
(0x05)
Fundamental
Activity
4 or 32 or
Integer>
One integer for each sensor
Range 0 - 999